Parker’s Composite Sealing Systems Division has introduced the UHP Slit Valve Door, an engineered sealing system designed to improve productivity and reduce downtime in critical semiconductor processing applications. Developed in co-operation with a leading semiconductor OEM, the UHP Slit Valve Door consists of a sealing element chemically bonded to an aluminium or stainless steel door. This sealing element typically consists of Parker’s chemical-resistant, thermally stable Parofluor (perfluorinated FFKM) or fluorocarbon (FKM) compounds. The bonded seal and UHP processing are designed to eliminate leaks and contamination.
